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Surface and Thin-Film Analysis

Auger Electron Spectroscopy

Physical Electronics Model 545


Location:  22 Shepherd Labs

Contacts:  John Thomas, Bing Luo

Specifications:

  • Sample Imaging with ~ 2 µm resolution
  • Auger elemental mapping
  • Multi-spot surface analysis
  • Thin Film Elemental Depth Profiling to ~ 1µm using ion beam sputtering
  • Auger Spatial Resolution to ~ 10 µm
  • Multi-sample handling