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A FREE workshop on Spectroscopic Ellipsometry
You are invited to a FREE workshop on the introduction to Spectroscopic Ellipsometry, which will be held at the Characterization Facility (Charfac) in the Institute of Technology, University of Minnesota, on May 14, 2008.
Spectroscopic ellipsometry (SE) has become the standard for measuring thin film thickness and optical constants (n and k). Spectroscopic ellipsometry is used for characterization of all types of materials: dielectrics, semiconductors, metals, organics, and more. Co-organized by Charfac and J. A. Woollam Co, a leading ellipsometry instrument vendor, this workshop features the review of the basics of ellipsometry including polarization of light, ellipsometric data and instrumentation, and a brief review of the optical properties of materials. Critical aspects of data analysis will also be discussed, and some example data sets will be analyzed. As time permits, advanced applications will be also discussed.
A researcher from J. A. Woollam, Dr. Tom Tiwald will be giving the lectures in the morning of the workshop, and extensive demo session on the instrument in the afternoon will give participants the opportunity to apply the knowledge from the lectures.
The workshop is free of charge. However, registration is required. To register please email your detailed contact information to dongx033@umn.edu. For any questions regarding to the workshop, please contact Dr. Jinping Dong at Charfac (612-625-1841, dongx033@umn.edu)
Please find detailed information below.
Spectroscopic Ellipsometry: Theory & modeling
May 14, 2008
University of Minnesota,
EECS Building, Room 3-180
200 Union Street SE,
Minneapolis, MN 554455-0167
Spectroscopic Ellipsometry (SE) is a non-contact, non-destructive optical technique that measures the change in polarization light upon interaction with a sample. In this talk, we will review the basics of ellipsometry including polarization of light, ellipsometric data and instrumentation, and a brief review of the optical properties of materials. We will then discuss critical aspects of data analysis, analyzing some example data sets. Advanced applications will be also discussed as time permits.
| Program Wednesday, May 14, 2008 |
|
|---|---|
| 9:00-9:30 AM | Coffee & Registration |
| 9:30-10:30 AM | Review of ellipsometry basics |
| 10:30-11:00 AM | Break |
| 11:00-12:00 PM | Ellipsometric data and instrumentation, data analysis |
| 12:00-1:00 PM | Lunch (on site, compliments of J. A. Woollam Co.) |
| 1:00 PM | Equipment Demonstration |
