Graphene fixed-end beam arrays based on mechanical exfoliation


P. Li,1 Z. You,1 G. Haugstad,2 and T. Cui1

1Department of Mechanical Engineering and 2Characterization Facility, University of Minnesota, Minneapolis, Minnesota 55455

Abstract

A low-cost mechanical exfoliation method is presented to transfer graphite to graphene for free-standing beam arrays. Nickel film or photoresist is used to peel off and transfer patterned single-layer or multilayer graphene onto substrates with macroscopic continuity. Free-standing graphene beam arrays are fabricated on both silicon and polymer substrates. Their mechanical properties are studied by atomic force microscopy. Finally, a graphene based radio frequency switch is demonstrated, with its pull-in voltage and graphene-silicon junction investigated.