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Nanotechnology News from the Characterization Facilty and the Nanofabrication Center.

 
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Home > Instruments > TOF-SIMS

Surface and Thin-Film Analysis Time-of-Flight Secondary Ion Mass Spectrometer (TOF-SIMS) Physical Electronics Instruments (PHI) TRIFT

Specifications:

• focused pulsed gallium ion beam, 0.5 to 25 kV
• CCD camera with imaging capability down to 3 µm
• charge compensation source - pulsed low-energy electron gun
• Mass Range - 0-10,000 amu
• Mass Resolution - 9000 or greater
• Spatial Resolution - 1 µm