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Field Emission Gun
Scanning Electron Microscope

JEOL 6500

Description:

Field-emission gun Scanning electron microscope (FEG-SEM) equipped with an energy dispersive spectrometer (EDS).  It operates at 0.5 to 30 kV with an ultimate resolution of 1.5 nm, and a magnification range of 10x to 400,000x.  Available image modes include secondary and backscattered electron images, X-Ray mapping, electron backscatter diffraction and cathodoluminescence.

Equipment:

  • JEOL 6500 with a variety of sample holders.
  • Backscattered imaging at TV rates and low voltage using the Centaurus detector.
  • Chemical analysis of bulk samples with elements as low as sodium available using a Thermo-Noran Vantage system.
  • Cathodoluminescence analysis with a Gatan (Oxford) MonoCL 2 system.
  • Crystallographic analysis with a EBSD system from HKL allowing pattern indexing and texture mapping with Channel 5 software.

Accessories:

  • Back scatter detector
  • EDS system
  • Specimen current detector
  • Electron Backscatter patterns
  • Cathodoluminescence
  • Chamberscope for optical viewing specimen in the microscope.

Applications:

  • Examination of fracture surfaces.
  • Phase identification from geological samples.
  • Examination and quantification of nano-scratch tests.
  • Stereo-imaging of surfaces.
  • Microstructure of surfactant systems.
  • Evaluation of lithographic specimens.
  • Measurement of the width of layers of magnetic read devices.
  • Characterization of grain boundaries of ceramics.

Capabilities:

  • Sample size: 50 x 125 x 125 mm
  • Lateral resolution: 1.5 nm
  • Lateral range: 50 mm x 50 mm